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Spare Parts

Supported OEM's:

  • AMAT
  • Ebara
  • Lam
  • Novellus
  • Semitool
  • Speedfam
  • TEL
  • Varian

 Process Groups:

  • CMP
  • CVD
  • Diffusion
  • Etch
  • Implant
  • Metrology
  • Photo
  • PVD

Consumable Products:

  • CMP Rings & Shims
  • Etch Chamber Parts & Hardware
  • Implant Chamber Parts
  • Bellows Assemblies
  • Process Shielding
  • PM Kits

Other Parts:

  • Wafer Handling Arms
  • Wafer Vacuum Transfer Parts
  • Stainless Steel Gasline Weldments
  • Custom Fasteners & Hardware
  • Custom Installation Tools

Capabilities:

  • Cleanroom Packaging
  • CNC Mill
  • CNC Lathe
  • Coating Services
  • Comlpex Assembly
  • Injection Molding
  • Laser/Water Cutting
  • Leak Testing
  • Press Cutting
  • Texturizing
  • Wire EDM

Special Materials:

  • Ceramic
  • Graphite
  • Molybdenum
  • PEEK
  • PPS
  • Quartz
  • Sapphire
  • Silicon
  • Tungsten
  • Vespel

RFQ